Patent · US Expired

Method of manufacturing a micromechanical component

US6905615B2 · kind B2 · utility

4Cited by

4References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Frank Fischer · Mesa, US
Wilhelm Frey · Palo Alto, US
Udo Bischof · Wannweil, DE
Lars Metzger · Albstadt, DE

Key dates

Filing date	Jan 24, 2002
Grant date	Jun 14, 2005
Priority date	—
Expiry date	Dec 27, 2022

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/053
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.