Probe card for electrical testing a chip in a wide temperature range
US6906543B2 · kind B2 · utility
67Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2003 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Dec 11, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure provides a probe card for electrical testing a chip in a wide temperature range. The probe card includes a circuit board, a cover, a circular supporter positioned on the circuit board, at least a probe needle fixed on the circular supporter by an adhesive, and a flow line positioned in the space between the circuit board and the cover. Embodiments of the invention moderates the temperature of the probe card by introducing a fluid such as, for example, forced-air or nitrogen into the flow line to carry heat into or out of the probe card.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.