Apparatus for and method of smoothing substrate surface
US6908369B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2003 |
| Grant date | Jun 21, 2005 |
| Priority date | — |
| Expiry date | Sep 2, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B21/004
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for smoothing a surface of a rotatably supported substrate includes a base plate, a block having an extending arm structure and being attached to the base plate so as to be movable along the surface of the base plate, a roller attached to a tip portion of the arm structure in a direction perpendicular to the base plate, a mobile member attached to the arm structure so as to be movable perpendicularly to the axial direction of the roller, a tape-running device attached to the base plate for feeding and taking up a polishing tape through the roller so as to advance the tape around the mobile member, and a moving device attached to the arm structure of the block for moving the mobile member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.