Tetsujiro Tada
3Patents
2h-index
8Co-inventors
33Inventor score
Filing activity: Jul 9, 2003 → Jan 27, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7927187B2 | Method of polishing a target surface | Performing Operations; Transporting | 6 | Active |
| US8814635B2 | Substrate polishing method and device | Performing Operations; Transporting | 2 | Active |
| US6908369B2 | Apparatus for and method of smoothing substrate surface | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.