Inventor · Akishima, JP

Tetsujiro Tada

3Patents
2h-index
8Co-inventors
33Inventor score

Filing activity: Jul 9, 2003 → Jan 27, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US7927187B2 Method of polishing a target surface Performing Operations; Transporting 6 Active
US8814635B2 Substrate polishing method and device Performing Operations; Transporting 2 Active
US6908369B2 Apparatus for and method of smoothing substrate surface Performing Operations; Transporting 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.