Precision polar coordinate stage
US6910847B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2002 |
| Grant date | Jun 28, 2005 |
| Priority date | — |
| Expiry date | Dec 24, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A polar coordinate stage that may be used in a chamber includes a rotating chuck that moves in a linear direction and has the motors that drive the motion of the chuck outside the chamber. The stage can include a linkage of arms to support and drive the linear motion of the chuck. The chuck is coupled to a horizontal rail such that rotational motion of a first arm is translated into precise linear motion of the chuck along the horizontal rail through a second arm. In addition, a system of pulleys within the arms translates rotational (or linear) motion through the arms and rotates the chuck. Vertical motion may be provided by an actuator between the second arm and the chuck or by a motor under the stage. Because of the compact nature of the stage, it can be easily placed within a chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.