John D. Heaton
11Patents
8h-index
13Co-inventors
61Inventor score
Filing activity: Dec 8, 1998 → Jan 18, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6982793B1 | Method and apparatus for using an alignment target with designed in offset | Electricity | 102 | Expired |
| US6992764B1 | Measuring an alignment target with a single polarization state | Physics | 75 | Expired |
| US7046361B1 | Positioning two elements using an alignment target with a designed offset | Physics | 38 | Expired |
| US6713753B1 | Combination of normal and oblique incidence polarimetry for the characterization of gratings | Physics | 35 | Expired |
| US7230705B1 | Alignment target with designed in offset | Electricity | 30 | Expired |
| US7295314B1 | Metrology/inspection positioning system | Physics | 22 | Expired |
| US6958819B1 | Encoder with an alignment target | Physics | 15 | Expired |
| US6108077A | Sample support with a non-reflecting sample supporting surface | Physics | 10 | Expired |
| US6970255B1 | Encoder measurement based on layer thickness | Physics | 8 | Expired |
| US6910847B1 | Precision polar coordinate stage | Electricity | 7 | Expired |
| US7289215B2 | Image control in a metrology/inspection positioning system | Physics | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.