Methods and systems for controlling reticle-induced errors
US6912435B2 · kind B2 · utility
8Cited by
34References
40Claims
0Family size
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Key dates
| Filing date | Aug 28, 2002 |
| Grant date | Jun 28, 2005 |
| Priority date | — |
| Expiry date | Aug 28, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Systems and methods for controlling at least one reticle-induced error in a process system, the systems and methods including adjusting measurement data associated with the process system, where the adjustment can be based on at least one reticle identifier (ID) associated with the measurement data, and reticle-induced error data associated with the at least one reticle ID. The methods and systems also include combining the adjusted measurement data to compute at least one control for the process system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.