Method and apparatus for point-by-point scanning of a specimen

US6914238B2 · kind B2 · utility

Assignee

• Leica Microsystems Heidelberg GmbH · DE

Inventors

• Johann Engelhardt · Bad Schönborn, DE
• Bernd Widzgowski · Dossenheim, DE

Key dates

• Filing date: May 29, 2002
• Grant date: Jul 5, 2005
• Expiry date: Oct 9, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0084
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method and an apparatus for point-by-point scanning of a specimen (15) are disclosed. The method is characterized by the steps of generation (45) of a nominal signal (10) for each scan point and transfer (47) of the nominal signal to a scanning device (7). In further steps, determination (49) of an actual signal (25) for each scan point from the setting of the scanning device (7), detection (51) of at least one detection signal (21) for each scan point, calculation (53) of a display signal (27) and an image point position (29) from the actual signal (25) and/or the nominal signal (10) and the detection signal (21), and assignment (55) of the display signal (27) to the image point position (29), are performed.