Methods and apparatus for attaching getters to MEMS device housings
US6914323B2 · kind B2 · utility
7Cited by
11References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2003 |
| Grant date | Jul 5, 2005 |
| Priority date | — |
| Expiry date | Mar 20, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/10253
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for reducing occurrences of loose gettering material particles within micro-electromechanical system (MEMS) devices is described. The MEMS devices include a micro-machine within a substantially sealed cavity formed by a housing and a cover for the housing. The cavity containing a getter mounted on a getter substrate which is to be attached to the cover. The method includes providing an area between a portion of the cover and a portion of the getter substrate, positioning the getter within the area, and attaching the getter substrate to the cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.