Conveyor device and film formation apparatus for a flexible substrate
US6916509B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 5, 2004 |
| Grant date | Jul 12, 2005 |
| Priority date | — |
| Expiry date | Nov 5, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/545
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
With a conventional cylindrical can method, a region used as a film formation ground electrode is a portion of the cylindrical can, and an apparatus becomes larger in size in proportion to the surface area of the electrode. A conveyor device and a film formation apparatus having the conveyor device are provided, which have a unit for continuously conveying a flexible substrate from one end to the other end, and which are characterized in that a plurality of cylindrical rollers are provided between the one end and the other end along an arc with a radius R, the cylindrical rollers being arranged such that their center axes run parallel to each other, and that a mechanism for conveying the flexible substrate while the substrate is in contact with each of the plurality of cylindrical rollers is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.