Masato Yonezawa
38Patents
12h-index
48Co-inventors
81Inventor score
Filing activity: Oct 23, 1996 → Mar 23, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6027960A | Laser annealing method and laser annealing device | Emerging Cross-Sectional Technologies | 90 | Expired |
| US7030551B2 | Area sensor and display apparatus provided with an area sensor | Emerging Cross-Sectional Technologies | 87 | Expired |
| US6444506B1 | Method of manufacturing silicon thin film devices using laser annealing in a hydrogen mixture gas followed by nitride formation | Electricity | 83 | Expired |
| US8298628B2 | Low temperature deposition of silicon-containing films | Electricity | 51 | Active |
| US6846696B2 | Method for manufacturing solar battery | Emerging Cross-Sectional Technologies | 51 | Expired |
| US6348369B1 | Method for manufacturing semiconductor devices | Emerging Cross-Sectional Technologies | 37 | Expired |
| US8563096B2 | Vertical film formation apparatus and method for using same | Chemistry; Metallurgy | 31 | Active |
| US6692984B2 | Method of manufacturing a semiconductor device | Electricity | 29 | Expired |
| US6743700B2 | Semiconductor film, semiconductor device and method of their production | Electricity | 24 | Expired |
| US6825492B2 | Method of manufacturing a semiconductor device | Electricity | 18 | Expired |
| US6620288B2 | Substrate treatment apparatus | Electricity | 17 | Expired |
| US6827787B2 | Conveyor device and film formation apparatus for a flexible substrate | Chemistry; Metallurgy | 16 | Expired |
| US7786544B2 | Area sensor and display apparatus provided with an area sensor | Emerging Cross-Sectional Technologies | 12 | Active |
| US7041580B2 | Laser annealing method and laser annealing device | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7351605B2 | Method of manufacturing a semiconductor device | Electricity | 9 | Expired |
| US7528057B2 | Laser annealing method and laser annealing device | Emerging Cross-Sectional Technologies | 8 | Active |
| US8058699B2 | Area sensor and display apparatus provided with an area sensor | Emerging Cross-Sectional Technologies | 6 | Active |
| US7365004B2 | Method for manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7384828B2 | Semiconductor film, semiconductor device and method of their production | Electricity | 5 | Expired |
| US6916509B2 | Conveyor device and film formation apparatus for a flexible substrate | Chemistry; Metallurgy | 5 | Expired |
| US8216648B2 | Film formation method and apparatus | Electricity | 4 | Active |
| US7594479B2 | Plasma CVD device and discharge electrode | Electricity | 4 | Expired |
| US7462376B2 | CVD method for forming silicon nitride film | Electricity | 3 | Expired |
| US9376751B2 | Plasma processing device and operation method | Electricity | 1 | Active |
| US7953512B2 | Substrate processing system, control method for substrate processing apparatus and program stored on medium | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.