Non- contacting capacitive diagnostic device
US6917209B2 · kind B2 · utility
2Cited by
5References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 15, 2001 |
| Grant date | Jul 12, 2005 |
| Priority date | — |
| Expiry date | Nov 8, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F71/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.