Achromatic fresnel optics for ultraviolet and x-ray radiation
US6917472B1 · kind B1 · utility
45Cited by
10References
44Claims
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Key dates
| Filing date | Apr 25, 2002 |
| Grant date | Jul 12, 2005 |
| Priority date | — |
| Expiry date | Dec 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70316
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.