Method for producing coated workpieces, uses and installation for the method
US6918352B2 · kind B2 · utility
15Cited by
14References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2002 |
| Grant date | Jul 19, 2005 |
| Priority date | — |
| Expiry date | Jul 22, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32018
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system and a method produce workpieces coated by PECVD with a quality sufficient for epitaxy. Included are a vacuum recipient, a plasma discharge source operationally connected to the vacuum recipient and a workpiece holder within the vacuum recipient, said plasma discharge source generating on said workpiece holder ions with an energy of below 15 eV. The plasma discharge source can be a low-voltage plasma discharge source in which at least one cathode is arranged within a cathode chamber coupled to the vacuum recipient by a diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.