Method and apparatus for MEMS device nebulizer lubrication system
US6921680B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 30, 2002 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | Dec 30, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00944
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of N2 turbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.