Roger A. Robbins
8Patents
7h-index
8Co-inventors
52Inventor score
Filing activity: Sep 17, 1991 → Apr 1, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5423942A | Method and apparatus for reducing etching erosion in a plasma containment tube | Emerging Cross-Sectional Technologies | 458 | Expired |
| US6300294A | Lubricant delivery for micromechanical devices | Physics | 75 | Expired |
| US5474614A | Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp | Electricity | 49 | Expired |
| US6365229B1 | Surface treatment material deposition and recapture | Performing Operations; Transporting | 44 | Expired |
| US6992375B2 | Anchor for device package | Electricity | 30 | Expired |
| US7264179B2 | Method and apparatus for MEMS device nebulizer lubrication system | Performing Operations; Transporting | 18 | Expired |
| US6921680B2 | Method and apparatus for MEMS device nebulizer lubrication system | Performing Operations; Transporting | 11 | Expired |
| US5266527A | Conformal wafer chuck for plasma processing having a non-planar surface | Emerging Cross-Sectional Technologies | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.