System and method for mitigating oxide growth in a gate dielectric
US6921703B2 · kind B2 · utility
4Cited by
11References
7Claims
0Family size
Assignee
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Key dates
| Filing date | May 13, 2003 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | May 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/693
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Oxide growth of a gate dielectric layer that occurs between processes used in the fabrication of a gate dielectric structure can be reduced. The reduction in oxide growth can be achieved by maintaining the gate dielectric layer in an ambient effective to mitigate oxide growth of the gate dielectric layer between at least two sequential process steps used in the fabrication the gate dielectric structure. Maintaining the gate dielectric layer in an ambient effective to mitigate oxide growth also improves the uniformity of nitrogen implanted in the gate dielectric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.