Method and apparatus for blending process materials
US6923568B2 · kind B2 · utility
52Cited by
36References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2001 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Jul 31, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01F2101/58
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.