CELERITY, INC.
🏢 View company profile →43Patents
9Active
43Granted
41Portfolio score
Filing activity: Jul 31, 2001 → Aug 22, 2007 · 9 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6752166B2 | Method and apparatus for providing a determined ratio of process fluids | Emerging Cross-Sectional Technologies | 87 | Expired |
| US7073392B2 | Methods and apparatus for pressure compensation in a mass flow controller | Emerging Cross-Sectional Technologies | 54 | Expired |
| US6923568B2 | Method and apparatus for blending process materials | Performing Operations; Transporting | 52 | Expired |
| US7360448B2 | Ultrasonic flow sensor having reflecting interface | Physics | 46 | Active |
| US6962164B2 | System and method for a mass flow controller | Emerging Cross-Sectional Technologies | 43 | Expired |
| US7216019B2 | Method and system for a mass flow controller with reduced pressure sensitivity | Physics | 31 | Expired |
| US7344298B2 | Method and apparatus for blending process materials | Physics | 23 | Expired |
| US7434477B2 | Methods and apparatus for pressure compensation in a mass flow controller | Emerging Cross-Sectional Technologies | 22 | Active |
| US7117104B2 | Ultrasonic liquid flow controller | Emerging Cross-Sectional Technologies | 22 | Expired |
| US7334605B2 | Modular substrate gas panel having manifold connections in a common plane | Emerging Cross-Sectional Technologies | 21 | Expired |
| US7273063B2 | Methods and apparatus for pressure compensation in a mass flow controller | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7231931B2 | System and method for a mass flow controller | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7133785B2 | Valve control system and method | Physics | 17 | Expired |
| US7126094B2 | Surface mount heater | Electricity | 17 | Expired |
| US7412986B2 | Method and system for flow measurement and validation of a mass flow controller | Emerging Cross-Sectional Technologies | 16 | Expired |
| US7380564B2 | System and method for a mass flow controller | Emerging Cross-Sectional Technologies | 15 | Active |
| US7225835B2 | Modular substrate gas panel having manifold connections in a common plane | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7272512B2 | Flow sensor signal conversion | Physics | 14 | Expired |
| US6769463B2 | Fluid flow system | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6941965B2 | Method and apparatus for providing a determined ratio of process fluids | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7360551B2 | Method and apparatus for providing a determined ratio of process fluids | Emerging Cross-Sectional Technologies | 12 | Active |
| US7307247B2 | Surface mount heater | Electricity | 12 | Active |
| US6845659B2 | Variable resistance sensor with common reference leg | Physics | 11 | Expired |
| US7143774B2 | Method and apparatus for providing a determined ratio of process fluids | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7424894B2 | Method and apparatus for providing a determined ratio of process fluids | Emerging Cross-Sectional Technologies | 10 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.