Thermally cured underlayer for lithographic application

US6924339B2 · kind B2 · utility

Assignee

• Arch Specialty Chemicals, Inc. · US

Inventors

• Binod B. De · Attleboro, US
• Sanjay Malik · Attleboro, US
• Gregory Spaziano · Providence, US
• John Biafore · Grand Blanc, US
• Patrick Foster · Providence, US
• Sidney George Slater · Poughquag, US
• Thomas Steinhausler · Barrington, US
• Andrew J. Blakeney · Seekonk, US

Key dates

• Filing date: May 14, 2003
• Grant date: Aug 2, 2005
• Expiry date: Nov 8, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0392
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the following formula: wherein R1 is H or methyl; R2 is a substituted or unsubstituted C6-C14 aryl acrylate or C6-C14 aryl methacrylate group wherein the substituted groups may be phenyl, C1-4 alkyl or C1-4 alkoxy; R3 is a hydroxyl functionalized C1-C8 alkyl acrylate, methacrylate or C6-C14 aryl group, R4 is a C1-C10 linear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [—R4O—]p; R5 is a C1-C10 linear, branched or cyclic alkyl, substituted or unsubstituted C6-C14 aryl, or substituted or unsubstituted C7-C15 alicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.