Device for reducing the impact of distortions in a microscope
US6924489B2 · kind B2 · utility
1Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2004 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Jan 13, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a device for reducing the impact of undesired distortions when studying a sample in an electron microscope, wherein said sample is arranged to be mounted on a micro-positioning device, characterised in that said micro-positioning device is connected with a control device, being arranged to control said micro-positioning device so as to compensate for measurement errors due to undesired distortions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.