Method and microscope for detection of a specimen
US6924900B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 2, 2002 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Jul 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention concerns a method and a microscope for detection of a specimen, having a light source that illuminates the specimen and an imaging system that images the specimen onto a detector. For purposes of an increase in the effective resolution capability of the imaging system that goes beyond the limit of the resolution capability defined by the properties of the imaging system, the method and the microscope according to the present invention for detection of a specimen are characterized in that the specimen is detected repeatedly with a different resolution of the imaging system in each case; and that in order to determine an optimized resolution capability, the detected image data are conveyed to a statistical and/or numerical analysis operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.