Gas generation system
US6926871B1 · kind B1 · utility
1Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 6, 2000 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Mar 6, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A gas generator system is provided wherein supply sources for halogenated gases, including pure molecular halogens, are connected into a gas reaction chamber, or chamber system, to enable generation of a predetermined gas for localized use in a subsequent process. The reaction chamber has a valved outlet for direct supply of the generated gas to a single or multiple chamber processing tool or process chamber. Thus it is possible, for example, to provide for the localized generation of reactive process gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.