Surface Technology Systems PLC
19Patents
0Active
19Granted
33Portfolio score
Filing activity: Sep 2, 1992 → Mar 16, 2005
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6051503A | Method of surface treatment of semiconductor substrates | Electricity | 211 | Expired |
| US6187685A | Method and apparatus for etching a substrate | Electricity | 135 | Expired |
| US5330301A | Loading mechanisms | Emerging Cross-Sectional Technologies | 61 | Expired |
| US6261962A | Method of surface treatment of semiconductor substrates | Electricity | 44 | Expired |
| US6409876B1 | Apparatus for etching a workpiece | Electricity | 41 | Expired |
| US6355181B1 | Method and apparatus for manufacturing a micromechanical device | Performing Operations; Transporting | 35 | Expired |
| US6239404A | Plasma processing apparatus | Electricity | 32 | Expired |
| US6259209A | Plasma processing apparatus with coils in dielectric windows | Electricity | 25 | Expired |
| US7141504B1 | Method and apparatus for anisotropic etching | Performing Operations; Transporting | 21 | Expired |
| US6458239B1 | Plasma processing apparatus | Electricity | 13 | Expired |
| US6534922B2 | Plasma processing apparatus | Electricity | 12 | Expired |
| US6628500B1 | Method and apparatus for dechucking a substrate from an electrostatic chuck | Electricity | 11 | Expired |
| US6602433B1 | Gas delivery system | Performing Operations; Transporting | 10 | Expired |
| US6933242B1 | Plasma etching | Electricity | 10 | Expired |
| US6602384B2 | Plasma processing apparatus | Electricity | 4 | Expired |
| US7306745B1 | Method and apparatus for stabilizing a plasma | Electricity | 4 | Expired |
| US6929784B1 | Chlorotrifuorine gas generator system | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7491649B2 | Plasma processing apparatus | Electricity | 2 | Expired |
| US6926871B1 | Gas generation system | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.