Site-specific method for large area uniform thickness plan view transmission electron microscopy sample preparation
US6927174B2 · kind B2 · utility
2Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2003 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Aug 12, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for preparing a sample includes separating a portion of substrate from a sample, performing focused ion beam milling, and removing additional sample material using an etchant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.