Apparatus and methods for ferroelectric ram fatigue testing
US6928376B2 · kind B2 · utility
2Cited by
5References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2002 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Oct 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2029/5002
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Apparatus are provided for fatigue testing ferroelectric material in a wafer, including an on-chip oscillator to provide a bipolar waveform to a ferroelectric capacitor formed in the wafer, as well as a switching system to selectively provide external access to the ferroelectric capacitor. Test methods are also provided, including measuring a performance characteristic of a ferroelectric capacitor in the wafer, providing a bipolar waveform to the ferroelectric capacitor for a number of cycles using an on-chip oscillator, and again measuring the performance characteristic after an integer number of cycles of the bipolar waveform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.