Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
US6928872B2 · kind B2 · utility
40Cited by
13References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | May 21, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated gyroscope, including an acceleration sensor formed by: a driving assembly; a sensitive mass extending in at least one first and second directions and being moved by the driving assembly in the first direction; and by a capacitive sensing electrode, facing the sensitive mass. The acceleration sensor has an rotation axis parallel to the second direction, and the sensitive mass is sensitive to forces acting in a third direction perpendicular to the other directions. The capacitive sensing electrode is formed by a conductive material region extending underneath the sensitive mass and spaced therefrom by an air gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.