Chlorotrifuorine gas generator system
US6929784B1 · kind B1 · utility
3Cited by
3References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2000 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Mar 6, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S422/906
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A ClF3 gas generation system is provided with supply sources of chlorine (3) (for example a cylinder of compressed chlorine) and fluorine (4) (for example a fluorine generator) connected into a gas reaction chamber (2) enabling generation of ClF3 gas. The reaction chamber has a valved outlet (C) for the supply of the ClF3 gas to a process chamber for immediate local use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.