Patent · US Expired

Semiconductor device and manufacturing method of the same

US6930360B2 · kind B2 · utility

130Cited by
1References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 1, 2003
Grant dateAug 16, 2005
Priority date
Expiry dateJul 1, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/0227
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device having a semiconductor layer, includes: a first impurity atom having a covalent bond radius larger than a minimum radius of a covalent bond of a semiconductor constituent atom of a semiconductor layer; and a second impurity atom having a covalent bond radius smaller than a maximum radius of the covalent bond of the semiconductor constituent atom; wherein the first and second impurity atoms are arranged in a nearest neighbor lattice site location and at least one of the first and second impurity atoms is electrically active.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.