Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein
US6930394B2 · kind B2 · utility
3Cited by
9References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Aug 16, 2005 |
| Priority date | — |
| Expiry date | Sep 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A hole is formed in an insulating film containing silicon and carbon. The insulating film has a density or a carbon concentration varying gradually in the direction of the thickness thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.