Kinya Goto
17Patents
4h-index
11Co-inventors
53Inventor score
Filing activity: Jul 26, 1999 → Dec 23, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6734489B2 | Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device | Electricity | 18 | Expired |
| US7605448B2 | Semiconductor device with seal ring | Electricity | 15 | Expired |
| US6399424B1 | Method of manufacturing contact structure | Electricity | 7 | Expired |
| US8018030B2 | Semiconductor chip with seal ring and sacrificial corner pattern | Electricity | 4 | Active |
| US7208408B2 | Method for fabricating a dual damascene contact in an insulating film having density gradually varying in the thickness direction | Electricity | 4 | Expired |
| US6930394B2 | Electronic device includes an insulating film having density or carbon concentration varying gradually in the direction of the thickness and a conductive film formed therein | Electricity | 3 | Expired |
| US6222256A | Semiconductor device and method of manufacturing the same | Electricity | 3 | Expired |
| US8963291B2 | Semiconductor chip with seal ring and sacrificial corner pattern | Electricity | 3 | Active |
| US7602063B2 | Semiconductor device and manufacturing method therefor | Electricity | 1 | Expired |
| US7671473B2 | Semiconductor device and method of fabricating the same | Electricity | 1 | Active |
| US8390135B2 | Semiconductor device | Electricity | 1 | Active |
| US6737319B2 | Method of manufacturing semiconductor device and semiconductor device | Electricity | 1 | Expired |
| US6551921B2 | Method of polishing a stack of dielectric layers including a fluorine containing silicon oxide layer | Electricity | 0 | Expired |
| US7960279B2 | Semiconductor device and manufacturing method therefor | Electricity | 0 | Active |
| US7981790B2 | Semiconductor device and method of fabricating the same | Electricity | 0 | Active |
| US9368459B2 | Semiconductor chip with seal ring and sacrificial corner pattern | Electricity | 0 | Active |
| US6509648B1 | Method of manufacturing semiconductor device and semiconductor device | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.