Electrostatic discharge testers for undistorted human-body-model and machine-model characteristics
US6933741B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2004 |
| Grant date | Aug 23, 2005 |
| Priority date | — |
| Expiry date | Jun 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An equipment (400) for testing semiconductor device performance under high energy pulse conditions, which comprises a high voltage generator (401) and an on/off switch relay (403). The relay is resistively connected by a first resistor (402) to the generator and by a second resistor (404) to the socket (405a) for the device-under-test (406); the relay is operable in a partially ionized ambient. A capacitor (407) is connected to the relay, to the generator, and to the device, and is operable to discharge high energy pulses through the device. A third resistor (410) is in parallel with the capacitor and the device, and is operable to suppress spurious pulses generated by the relay. This third resistor has a value between about 1 kΩ and 1 MΩ, preferably about 10 kΩ, several orders of magnitude greater than the on-resistance of the device-under-test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.