Automatic calibration of a wafer-handling robot
US6934606B1 · kind B1 · utility
44Cited by
7References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2003 |
| Grant date | Aug 23, 2005 |
| Priority date | — |
| Expiry date | Aug 16, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/40555
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.