Optical column for charged particle beam device
US6936817B2 · kind B2 · utility
15Cited by
12References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 2001 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Nov 23, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2449
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). The column is constituted by, among other things, a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.