Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like
US6936826B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2001 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Oct 11, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0216
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A coupling in a metrology system for placement between a floating inspection chamber and a fixed transfer chamber. The coupling prevents transfer of vibrations between the chambers and seals a passage between the chambers. The coupling includes a first flange attached to the inspection chamber, a second flange not in contact with the first flange and attached to the transfer chamber, and a looped diaphragm having an outer peripheral edge region secured to the first flange and an inner peripheral edge region secured to the second flange to thereby couple the flanges together and close a space between the flanges. Clamps are provided for securing the outer and inner peripheral edge regions of the diaphragm to the first and second flanges, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.