Inventor · Berlin, MA, US

Michael Busky

6Patents
3h-index
11Co-inventors
50Inventor score

Filing activity: Nov 21, 2000 → Oct 27, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US10258810B2 Particle beam scanning Electricity 42 Active
US9301384B2 Adjusting energy of a particle beam Electricity 33 Active
US9706636B2 Adjusting energy of a particle beam Electricity 3 Active
US6936826B2 Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like Electricity 2 Expired
US6528798B1 Technique for manufacturing an electrostatic element for steering a charged particle beam Electricity 2 Expired
US10456591B2 Particle beam scanning Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.