Slot design for metal interconnects
US6940108B2 · kind B2 · utility
16Cited by
14References
60Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2002 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Dec 5, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A slot design for a metal interconnect line comprising a metal interconnect including at least two metal sub-interconnect lines that intersect to form an intersection area. At least one of the metal sub-interconnect lines having elongated slots formed therein with the elongated slots each having an axis extending through the intersection area. The intersection area having an effective cross-sectional area that is at least equal to the effective cross-sectional area of at least one of the metal sub-interconnect lines having elongated slots formed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.