Patent · US Expired

Micromechanical structure, in particular for an acceleration sensor

US6940632B1 · kind B1 · utility

0Cited by

6References

5Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Andreas Kipp · Reutlingen, DE
Siegbert Goetz · Gerlingen, DE
Markus Lutz · Palo Alto, US

Key dates

Filing date	Nov 11, 2000
Grant date	Sep 6, 2005
Priority date	—
Expiry date	Nov 11, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position. The centrifugal mass has an oblong convex form and is essentially rotationally symmetric in relation to the longitudinal axis. The centrifugal mass optionally has a widening at both longitudinal ends, to which the flexible spring device is attached.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.