Contaminant particle removal by optical tweezers
US6943062B2 · kind B2 · utility
6Cited by
15References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2003 |
| Grant date | Sep 13, 2005 |
| Priority date | — |
| Expiry date | Oct 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The invention describes how contaminant particles may be removed from a surface without in any way damaging that surface. First, the positional co-ordinates of all particles on the surface are recorded. Optionally, only particles that can be expected to cause current or future damage to the surface are included. Then, using optical tweezers, each particle is individually removed and then disposed of. Six different ways to remove and dispose of particles are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.