Method and device for producing height images of technical surfaces with microscopic resolution

US6943823B2 · kind B2 · utility

Assignee

• Nanofocus AG · KR

Inventors

• Jürgen Valentin · Duisburg, DE
• Joachim Jordan · Nettetal, DE
• Hans-Hermann Schreier · Duisburg, DE

Key dates

• Filing date: Jan 11, 2001
• Grant date: Sep 13, 2005
• Expiry date: Sep 21, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0024
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for producing height images of technical surfaces with microscopic resolution uses a confocal measuring microspace. The sample to be measured is displaced in the direction (Z direction) towards the microspace in a controlled manner and images are produced at defined distances with a digital camera. The digitized images recorded are transmitted to a controller (PC) for further processing and evaluation and the light intensity maximum for every pixel is detected, the position of the maximum indicating the height of the sample to be measured. The sample is displaced in a continuous manner and that the image exposures are triggered at discrete localized distances. The intensities of the N individual images recorded and digitized in the above manner are stored in the PC in such a manner that a number N of subsequent storage locations is occupied for every pixel.