Generation of a library of periodic grating diffraction signals
US6943900B2 · kind B2 · utility
122Cited by
4References
65Claims
0Family size
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Key dates
| Filing date | Jul 16, 2001 |
| Grant date | Sep 13, 2005 |
| Priority date | — |
| Expiry date | Jan 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.