Surface state inspecting method and substrate inspecting apparatus
US6947151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2003 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Nov 13, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a substrate inspecting apparatus comprising a projecting section (4) in which light sources (8), (9) and (10) are provided for emitting colored lights of R, G and B in directions having different elevation angles, one or two color components which is/are greater than the mean value of the intensities of color components is/are extracted for an inspecting region including a soldered portion. Inclined surfaces adapted to the light sources (8), (9) and (10) are converted into monochromatic shaded images by the extraction processing. A boundary position between the inclined surfaces adapted to the light sources (8) and (9) are converted into one shaded image having a mixed color of red and green and the boundary position between the inclined surfaces adapted to the light sources (9) and (10) is converted into a different shaded image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.