Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6947200B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 24, 2004 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Oct 17, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.