Apparatus and method for self-calibration of mass flow controller
US6948508B2 · kind B2 · utility
43Cited by
28References
54Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Sep 27, 2005 |
| Priority date | — |
| Expiry date | Mar 14, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.