Electron microscopy system, electron microscopy method and focusing system for charged particles
US6949744B2 · kind B2 · utility
2Cited by
30References
42Claims
0Family size
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Key dates
| Filing date | Apr 16, 2004 |
| Grant date | Sep 27, 2005 |
| Priority date | — |
| Expiry date | Apr 16, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/153
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.