Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method

US6951824B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Frank Fischer · Mesa, US
• Peter Hein · Bamberg, DE
• Eckhard Graf · Gomaringen, DE

Key dates

• Filing date: Dec 28, 2000
• Grant date: Oct 4, 2005
• Expiry date: Dec 28, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for manufacturing a micromechanical component, that has at least one hollow space and a functional element that is provided at least partially in the hollow space and/or a functional layer that is provided at least partially therein, and a micromechanical component that is manufactured in accordance with the method, are described. To reduce manufacturing costs, the functional element and/or the functional layer is provided with a first protective layer at least in an area that directly or indirectly borders on a first sacrificial layer, which temporarily occupies the space of the hollow space that is subsequently formed in one or a plurality of etching steps, the material of the first protective layer being selected such that at least one etching process and/or etching medium, which etches or dissolves the first sacrificial layer, either does not substantially attack the first protective layer or does so only at a reduced etching rate in comparison to the first sacrificial layer.