Electrically isolated pillars in active devices

US6952043B2 · kind B2 · utility

Assignee

• MATRIX SEMICONDUCTOR, INC. · US

Inventors

• Michael A. Vyvoda · Fremont, US
• Manish Bhatia · Sunnyvale, US
• James M. Cleeves · Redwood City, US
• N. Johan Knall · Sunnyvale, US

Key dates

• Filing date: Jun 27, 2002
• Grant date: Oct 4, 2005
• Expiry date: Jun 27, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B99/16

Abstract

A method of forming an active device is provided. The method includes performing a first patterning operation on a first plurality of layers. This first patterning operation defines a first feature of the active device. Then, a second patterning operation can be performed on at least one layer of the first plurality of layers. This second patterning operation defines a second feature of the active device. Of importance, the first and second patterning operations are performed substantially back-to-back, thereby ensuring that the active device can accurately function.