E-beam voltage potential circuit performance library
US6952106B1 · kind B1 · utility
1Cited by
5References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 8, 2003 |
| Grant date | Oct 4, 2005 |
| Priority date | — |
| Expiry date | Oct 8, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/307
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Point-by-point image contrast values are generated from secondary electron collection during unbiased electron or ion beam bombardment of an integrated circuit (IC) in a vacuum environment to quantify the physical and electrical integrity of connections within the device. These values are stored for each type of circuit cell under standard conditions to quantify and check the performance of individual cells on the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.