Tunable MEMS capacitor
US6954348B1 · kind B1 · utility
11Cited by
11References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 4, 2004 |
| Grant date | Oct 11, 2005 |
| Priority date | — |
| Expiry date | Aug 4, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03J2200/39
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor (368) having a pair of stationary capacitor electrodes (392) that are fixed to and disposed the same distance above a substrate (388) in the vertical dimension. A tuning element (416) is suspended above the substrate (388) by an elevation system (460) that accommodates movement of the tuning element (416) in the vertical dimension. Changing the capacitance of the tunable capacitor (368) is accomplished by moving the tuning element (416) in the vertical dimension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.