Method of recycling fluorine using an adsorption purification process

US6955707B2 · kind B2 · utility

Assignee

• The BOC Group Limited · US

Inventors

• Edward Frederick Ezell · Hackettstown, US
• Richard Hogle · Oceanside, US
• Walter H. Whitlock · Chapel Hill, US
• Graham McFarlane · Carlsbad, US

Key dates

• Filing date: Jun 10, 2002
• Grant date: Oct 18, 2005
• Expiry date: Jan 2, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.